| Manufacturer | Hologenix |
|---|---|
| Model | NGS 3500 |
| Year | |
| Location | USA
|
The Hologenix NGS 3500 is a semiconductor inspection system designed for automated defect detection and precision dimensional metrology on wafers and other parts. It supports both automatic and manual operation modes, making it suitable for production environments as well as process development applications. The system offers comprehensive defect detection capabilities including surface and edge defects, texture defects such as stains, and missing or deformed object detection. It also features extensive defect review functionality with graphic maps, image archival, and CAD file import.
This advanced system includes a motorized stage with an 8"x8" XY travel range and motorized focus, enabling precise positioning and measurements. It supports brightfield and darkfield inspection with software-controlled coaxial and backlight illumination powered by dual 150W fiber optic sources. The maximum stage load capacity is 50 lbs, supported by a granite base and Z column for stability. Closed-loop linear stages and Z-axis with position feedback, combined with Micro-e Mercury 3500 smart encoder systems, provide resolution better than 1 micron. The staging speed can reach up to 200 mm/s, and the system can process 5 to 100 defects or measurements per second.
Optical components include a Nikon microscope with motorized objective rotation and a tilting ultrawide trinocular viewing head equipped with 10x eyepieces. A Hitachi camera is attached to the microscope for image capture. The inspection station features a stereo microscope head with dual eyepieces and adjustable focusing knobs. The illuminated sample stage has a transparent cover and adjustable fixtures in red and silver. The microscope and stage are mounted on a sturdy granite base supported by a metal structure. A control box with an emergency stop button is located on the left side, and cables connect the microscope to the control box. A monitor is partially visible nearby for system operation and image review. The system runs on Windows XP and uses RMS Vision Systems software with color graphics and offline defect review capabilities.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
Automatic Defect Detection & Classification
Automated Die Inspection
Precision Dimensional Metrology
Critical Dimension (CD) and Overlay Metrology
Automatic and Manual Operation
Surface & Edge Defect Detection
Texture Defect Detection (e.g. stains, etc.)
Missing or Deformed Object Detection
Extensive Defect Review Capability
Graphic Maps & Image Archival
CAD file import
The NGS Series defect detection and metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or as versatile process development systems. These systems offer a choice of high end microscope components (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and linear motor staging with 0.02 micron scales. There are several configurations available depending on your requirements. These include:a 200mm platform, a 300mm platform and a robotic platform for automated wafer and part handling.
Advanced wafer level dimensional metrology and defect detection system
motorized stage with 8"x8" XY travel
motorized focus
brightfield and darkfield inspection
5-100 defects/measurements per second typical
200mm/s staging speed
software controlled coaxial and backlight (transmitted light) with dual 150w fiber optic power supplies
maximum stage load capacity 50lbs
granite base and Z column
closed loop linear stages and Z axis with position feedback and Micro-e Mercury 3500 smart encoder systems provide better then 1um resolution
Software: RMS Vision Systems with color graphics, image archiving, and offline review of defects
Nikon microscope with motorized objective rotation, tilting ultrawide trinocular viewing head with 10x eyepieces
Hitachi CCTV, Windows XP
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Client type | Machinery dealer |
| Active since | 2019 |
| Offers online | 58 |
| Last activity | June 6, 2026 |
Automatic Defect Detection & Classification
Automated Die Inspection
Precision Dimensional Metrology
Critical Dimension (CD) and Overlay Metrology
Automatic and Manual Operation
Surface & Edge Defect Detection
Texture Defect Detection (e.g. stains, etc.)
Missing or Deformed Object Detection
Extensive Defect Review Capability
Graphic Maps & Image Archival
CAD file import
The NGS Series defect detection and metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or as versatile process development systems. These systems offer a choice of high end microscope components (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and linear motor staging with 0.02 micron scales. There are several configurations available depending on your requirements. These include:a 200mm platform, a 300mm platform and a robotic platform for automated wafer and part handling.
Advanced wafer level dimensional metrology and defect detection system
motorized stage with 8"x8" XY travel
motorized focus
brightfield and darkfield inspection
5-100 defects/measurements per second typical
200mm/s staging speed
software controlled coaxial and backlight (transmitted light) with dual 150w fiber optic power supplies
maximum stage load capacity 50lbs
granite base and Z column
closed loop linear stages and Z axis with position feedback and Micro-e Mercury 3500 smart encoder systems provide better then 1um resolution
Software: RMS Vision Systems with color graphics, image archiving, and offline review of defects
Nikon microscope with motorized objective rotation, tilting ultrawide trinocular viewing head with 10x eyepieces
Hitachi CCTV, Windows XP
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
The Hologenix NGS 3500 is a semiconductor inspection system designed for automated defect detection and precision dimensional metrology on wafers and other parts. It supports both automatic and manual operation modes, making it suitable for production environments as well as process development applications. The system offers comprehensive defect detection capabilities including surface and edge defects, texture defects such as stains, and missing or deformed object detection. It also features extensive defect review functionality with graphic maps, image archival, and CAD file import.
This advanced system includes a motorized stage with an 8"x8" XY travel range and motorized focus, enabling precise positioning and measurements. It supports brightfield and darkfield inspection with software-controlled coaxial and backlight illumination powered by dual 150W fiber optic sources. The maximum stage load capacity is 50 lbs, supported by a granite base and Z column for stability. Closed-loop linear stages and Z-axis with position feedback, combined with Micro-e Mercury 3500 smart encoder systems, provide resolution better than 1 micron. The staging speed can reach up to 200 mm/s, and the system can process 5 to 100 defects or measurements per second.
Optical components include a Nikon microscope with motorized objective rotation and a tilting ultrawide trinocular viewing head equipped with 10x eyepieces. A Hitachi camera is attached to the microscope for image capture. The inspection station features a stereo microscope head with dual eyepieces and adjustable focusing knobs. The illuminated sample stage has a transparent cover and adjustable fixtures in red and silver. The microscope and stage are mounted on a sturdy granite base supported by a metal structure. A control box with an emergency stop button is located on the left side, and cables connect the microscope to the control box. A monitor is partially visible nearby for system operation and image review. The system runs on Windows XP and uses RMS Vision Systems software with color graphics and offline defect review capabilities.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| Client type | Machinery dealer |
| Active since | 2019 |
| Offers online | 58 |
| Last activity | June 6, 2026 |
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