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| Category | Semiconductors - Metrology equipment |
| Software | |
| Type of Measurement | surface |
| worked hours | |
| hours under power | |
| state | excellent |
| At local norms | --------- |
| status | packed |
| Last availability date | 09/11/2026 |
| Product id | P261106175 |
| Language |
FRT MicroProf 200 optical 3D surface metrology system, multi-sensor, year 2014 ().
One of the few systems combining three measuring principles in one instrument:
- White-light interferometer (VSI/EPSI): areal topography and roughness on smooth surfaces, finest vertical resolution
- Confocal microscope (CFM Dual Technology) with motorised objective turret: steep flanks, rough and structured surfaces
- Chromatic point sensor (CWL): large height range, transparent layers, film and total thickness
Measuring tasks: topography, 2D/3D roughness and waviness to DIN EN ISO, step height, flatness, film thickness.
Machine data:
- Manufacturer: FRT GmbH, Bergisch Gladbach, Germany (now part of Camtek)
- Granite base plate, motorised XY stage (closed loop, encoders), motorised Z-axis
- Footprint approx. 150 x 80 cm
- Control PC with FRT Acquire and Mark III software
Series data (FRT manual, to be confirmed for this unit): vertical resolution down to ~3 nm, lateral ~1-2 µm, vertical range ~300 µm to 50 mm (sensor-dependent), measuring rate up to 4,000 Hz, sample up to 50 mm height / 5 kg.
Used, but little used and therefore in excellent condition. Fully functional – the system can be tested before purchase. Palletized. Dealer sale by MOLOR (B2B). Warranty, refurbishment and delivery by arrangement. Price on request.
All photos and details:
Please note that this description may have been translated or optimized with artificial intelligence (AI) automatically. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase.
| Client type | Factory – small or medium company |
| Active since | 2026 |
| Offers online | 1 |
| Last activity | Nov. 6, 2026 |
FRT MicroProf 200 optical 3D surface metrology system, multi-sensor, year 2014 ().
One of the few systems combining three measuring principles in one instrument:
- White-light interferometer (VSI/EPSI): areal topography and roughness on smooth surfaces, finest vertical resolution
- Confocal microscope (CFM Dual Technology) with motorised objective turret: steep flanks, rough and structured surfaces
- Chromatic point sensor (CWL): large height range, transparent layers, film and total thickness
Measuring tasks: topography, 2D/3D roughness and waviness to DIN EN ISO, step height, flatness, film thickness.
Machine data:
- Manufacturer: FRT GmbH, Bergisch Gladbach, Germany (now part of Camtek)
- Granite base plate, motorised XY stage (closed loop, encoders), motorised Z-axis
- Footprint approx. 150 x 80 cm
- Control PC with FRT Acquire and Mark III software
Series data (FRT manual, to be confirmed for this unit): vertical resolution down to ~3 nm, lateral ~1-2 µm, vertical range ~300 µm to 50 mm (sensor-dependent), measuring rate up to 4,000 Hz, sample up to 50 mm height / 5 kg.
Used, but little used and therefore in excellent condition. Fully functional – the system can be tested before purchase. Palletized. Dealer sale by MOLOR (B2B). Warranty, refurbishment and delivery by arrangement. Price on request.
All photos and details:
Please note that this description may have been translated or optimized with artificial intelligence (AI) automatically. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase.
| Category | Semiconductors - Metrology equipment |
| Software | |
| Type of Measurement | surface |
| worked hours | |
| hours under power | |
| state | excellent |
| At local norms | --------- |
| status | packed |
| Last availability date | 09/11/2026 |
| Product id | P261106175 |
| Language |
| Client type | Factory – small or medium company |
| Active since | 2026 |
| Offers online | 1 |
| Last activity | Nov. 6, 2026 |