Tokyo Electron Ltd. NS 300 Wafer Scrubber
MFG Date: 2001
EQUIPMENT DETAILS:
• Currently Configured for 300mm wafer sizes
• (3) 300mm FOUP Load Ports
• (1) Cassette Station Arm (CS Arm)
• (1) Process Station Arm (PS Arm)
• (2) Frontside Scrub Process Stations (F.Scr)
• (2) Backside Scrub Process Stations (B.Scr)
• (2) Auto Reversing Stations (A.RVS)
• Supporting Equipment:
o AC Power Box

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. Exapro recommends to check the details with the seller before a purchase

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Worked hours
Hours under power
State good
At local norms yes
Status visible
Client type Reseller
Active since 2010
Offers online 124
Last activity Sept. 25, 2023

Description

Tokyo Electron Ltd. NS 300 Wafer Scrubber
MFG Date: 2001
EQUIPMENT DETAILS:
• Currently Configured for 300mm wafer sizes
• (3) 300mm FOUP Load Ports
• (1) Cassette Station Arm (CS Arm)
• (1) Process Station Arm (PS Arm)
• (2) Frontside Scrub Process Stations (F.Scr)
• (2) Backside Scrub Process Stations (B.Scr)
• (2) Auto Reversing Stations (A.RVS)
• Supporting Equipment:
o AC Power Box

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. Exapro recommends to check the details with the seller before a purchase


Specifications

-------------------
Worked hours
Hours under power
State good
At local norms yes
Status visible

About this seller

Client type Reseller
Active since 2010
Offers online 124
Last activity Sept. 25, 2023

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Tokyo Electron Ltd. NS 300 Wafer machine