19,500 € Price is negotiable
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| ------------------- | |
| worked hours | 10 hours |
| hours under power | 10 hours |
| state | like new |
| At local norms | yes |
| status | under power |
| Last availability date | 08/06/2026 |
🔬 FOR SALE – Optical Profilometer KLA Filmetrics Profilm3D
KLA Filmetrics Profilm3D is a high-tech non-contact 3D optical profilometer using white light interferometry (WLI) for precise surface topography measurements. This system is among the leading solutions for research and production environments requiring high accuracy and reliability in the evaluation of microstructures and surface characteristics.
📋 Main features:
• Non-contact 3D measurement by white light interferometry (WLI) providing high precision and detail.
• Vertical resolution up to 0.05 µm in WLI mode and up to 0.001 µm (1 nm) with optional phase shift interferometry (PSI) mode.
• Measurement range from 50 nm to 10 mm, suitable for a wide range of applications.
• Fully motorized XYZ platform with 100x100 mm travel, Z-axis piezo movement up to 500 µm, and manual tilt ±5°, allowing precise positioning and adaptation to different samples.
• Various measurement modes including WLI, PSI, enhanced roughness measurement mode, and TotalFocus® True Color imaging.
• Measures key parameters such as roughness, waviness, step height, surface shape and curvature, radius of curvature, and volume.
• Software includes autofocus, FFT filtering, digital magnification up to 4x, and automated multi-point measurements.
🎯 Applications:
Ideal for semiconductor manufacturers, electronic components, research and development laboratories, universities, as well as companies working in precision optics and medical devices where high-precision and non-destructive surface measurements are required.
📦 Included are objectives, calibration standards (Cr-on-Si step height standard), and software license.
The machine is in very good condition and lightly used, making it a reliable tool for precise measurements in various industrial and scientific applications.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
🔬 FOR SALE – KLA Filmetrics Profilm3D Optical Profilometer *** RESERVED under OFFER ***
KLA Filmetrics Profilm3D, a high-performance non-contact 3D optical surface profilometer based on white light interferometry (WLI) — one of the most capable and affordable systems available for precision surface metrology in R&D and production environments.
📋 ABOUT THE MACHINE
Manufacturer: KLA Corporation / Filmetrics (San Diego, USA)
Model: Profilm3D Optical Profilometer
Condition: Very good – lightly used
✅ KEY FEATURES
• Non-contact 3D surface topography measurement using white light interferometry (WLI)
• Vertical resolution down to 0.05µm (WLI) and 0.001µm (1nm) with optional PSI mode
• Working range: 50nm to 10mm
• Fully motorized XYZ stage: 100x100mm travel, 500µm piezo Z travel, ±5° manual tilt
• Multiple measurement modes: WLI, Phase-Shifting Interferometry (PSI), Enhanced Roughness Mode, TotalFocus® True Color imaging
• Measures: roughness, waviness, step height, surface shape/bow, radius of curvature, volume
• Software: autofocus, FFT filtering, digital zoom (4x), automated multi-site measurements
• Suitable for semiconductor processes: etch, sputter, deposition, spin coating, and more
🎯 IDEAL FOR
Semiconductor fabs, electronics manufacturers, research labs, universities, and precision optics/medical device companies requiring high-accuracy, non-destructive surface measurement.
📦 WHAT'S INCLUDED
Objectives, calibration standards (Cr-on-Si step height standard), software license, and all available accessories.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
What is the Z-axis travel range of this KLA Filmetrics Profilm3D?
This KLA Filmetrics Profilm3D Optical Profilometer has a travel range in the Z-axis of approximately 250 nm without phase unwrapping and up to 3,000 nm with phase unwrapping.
What is the line measurement in the X and Y axes of the machine?
This equipment includes a 100 mm line in both the X and Y axes.
Is the PSI mode included with the machine?
The PSI mode is included with the machine.
What is the measurement range of this KLA Filmetrics Profilm3D?
This KLA Filmetrics Profilm3D optical profilometer has a measurement range of 250 nm to 3,000 nm.
What is the required travel range in the Z direction?
The unit requires a travel range of 100 mm in the Z direction for suitable application.
Does this equipment have coarse adjustment for sample positioning?
This equipment does not include a coarse adjustment capability for sample positioning.
What type of stages does this Filmetrics Profilm3D have?
This Filmetrics Profilm3D white light interferometer features motorized X-Y and Z stages with 100mm travel.
What is the travel distance of the X-Y stage?
The X-Y stage has a travel of 100mm by 100mm.
What is the range of the Z stage?
The Z stage has a range of 100mm.
Is the travel along all axes programmable?
The travel along all axes of motion is programmable.
What is the motion range of the manual tip and tilt stage?
This equipment includes a manual tip and tilt stage with ±5° of motion.
What measurement techniques does the system support?
The system supports phase shifting and vertical scanning interferometry for high-resolution 3D surface topography measurements.
Are motorized stages standard on the Profilm3D system?
Motorized stages for the X-Y and Z axes are standard on the Profilm3D system.
The following questions and answers are generated using artificial intelligence based on the product information available. They are provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| Client type | Factory – small or medium company |
| Active since | 2026 |
| Offers online | 8 |
| Last activity | June 6, 2026 |
🔬 FOR SALE – KLA Filmetrics Profilm3D Optical Profilometer *** RESERVED under OFFER ***
KLA Filmetrics Profilm3D, a high-performance non-contact 3D optical surface profilometer based on white light interferometry (WLI) — one of the most capable and affordable systems available for precision surface metrology in R&D and production environments.
📋 ABOUT THE MACHINE
Manufacturer: KLA Corporation / Filmetrics (San Diego, USA)
Model: Profilm3D Optical Profilometer
Condition: Very good – lightly used
✅ KEY FEATURES
• Non-contact 3D surface topography measurement using white light interferometry (WLI)
• Vertical resolution down to 0.05µm (WLI) and 0.001µm (1nm) with optional PSI mode
• Working range: 50nm to 10mm
• Fully motorized XYZ stage: 100x100mm travel, 500µm piezo Z travel, ±5° manual tilt
• Multiple measurement modes: WLI, Phase-Shifting Interferometry (PSI), Enhanced Roughness Mode, TotalFocus® True Color imaging
• Measures: roughness, waviness, step height, surface shape/bow, radius of curvature, volume
• Software: autofocus, FFT filtering, digital zoom (4x), automated multi-site measurements
• Suitable for semiconductor processes: etch, sputter, deposition, spin coating, and more
🎯 IDEAL FOR
Semiconductor fabs, electronics manufacturers, research labs, universities, and precision optics/medical device companies requiring high-accuracy, non-destructive surface measurement.
📦 WHAT'S INCLUDED
Objectives, calibration standards (Cr-on-Si step height standard), software license, and all available accessories.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
What is the Z-axis travel range of this KLA Filmetrics Profilm3D?
This KLA Filmetrics Profilm3D Optical Profilometer has a travel range in the Z-axis of approximately 250 nm without phase unwrapping and up to 3,000 nm with phase unwrapping.
What is the line measurement in the X and Y axes of the machine?
This equipment includes a 100 mm line in both the X and Y axes.
Is the PSI mode included with the machine?
The PSI mode is included with the machine.
What is the measurement range of this KLA Filmetrics Profilm3D?
This KLA Filmetrics Profilm3D optical profilometer has a measurement range of 250 nm to 3,000 nm.
What is the required travel range in the Z direction?
The unit requires a travel range of 100 mm in the Z direction for suitable application.
Does this equipment have coarse adjustment for sample positioning?
This equipment does not include a coarse adjustment capability for sample positioning.
What type of stages does this Filmetrics Profilm3D have?
This Filmetrics Profilm3D white light interferometer features motorized X-Y and Z stages with 100mm travel.
What is the travel distance of the X-Y stage?
The X-Y stage has a travel of 100mm by 100mm.
What is the range of the Z stage?
The Z stage has a range of 100mm.
Is the travel along all axes programmable?
The travel along all axes of motion is programmable.
What is the motion range of the manual tip and tilt stage?
This equipment includes a manual tip and tilt stage with ±5° of motion.
What measurement techniques does the system support?
The system supports phase shifting and vertical scanning interferometry for high-resolution 3D surface topography measurements.
Are motorized stages standard on the Profilm3D system?
Motorized stages for the X-Y and Z axes are standard on the Profilm3D system.
The following questions and answers are generated using artificial intelligence based on the product information available. They are provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| ------------------- | |
| worked hours | 10 hours |
| hours under power | 10 hours |
| state | like new |
| At local norms | yes |
| status | under power |
| Last availability date | 08/06/2026 |
🔬 FOR SALE – Optical Profilometer KLA Filmetrics Profilm3D
KLA Filmetrics Profilm3D is a high-tech non-contact 3D optical profilometer using white light interferometry (WLI) for precise surface topography measurements. This system is among the leading solutions for research and production environments requiring high accuracy and reliability in the evaluation of microstructures and surface characteristics.
📋 Main features:
• Non-contact 3D measurement by white light interferometry (WLI) providing high precision and detail.
• Vertical resolution up to 0.05 µm in WLI mode and up to 0.001 µm (1 nm) with optional phase shift interferometry (PSI) mode.
• Measurement range from 50 nm to 10 mm, suitable for a wide range of applications.
• Fully motorized XYZ platform with 100x100 mm travel, Z-axis piezo movement up to 500 µm, and manual tilt ±5°, allowing precise positioning and adaptation to different samples.
• Various measurement modes including WLI, PSI, enhanced roughness measurement mode, and TotalFocus® True Color imaging.
• Measures key parameters such as roughness, waviness, step height, surface shape and curvature, radius of curvature, and volume.
• Software includes autofocus, FFT filtering, digital magnification up to 4x, and automated multi-point measurements.
🎯 Applications:
Ideal for semiconductor manufacturers, electronic components, research and development laboratories, universities, as well as companies working in precision optics and medical devices where high-precision and non-destructive surface measurements are required.
📦 Included are objectives, calibration standards (Cr-on-Si step height standard), and software license.
The machine is in very good condition and lightly used, making it a reliable tool for precise measurements in various industrial and scientific applications.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| Client type | Factory – small or medium company |
| Active since | 2026 |
| Offers online | 8 |
| Last activity | June 6, 2026 |
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