Showing 1 - 3 out of 3
Year: 2005
Lasertec M-350H Wafer Inspection/Review system 300mm Vintage:2005 As isYear: 2009
300mm Wet Spin Scrubber Vintage:2009 As isYear: 2002
The tool is fully operational, running Cu on both sides. The auxiliary equipment is a power cabinet and two chillers (one for each side). Chemical dispense systems support the whole fleet so no chemical dispense equipment would be included. We run off of slurry loops under the floor as well as direct chemical distribution from a VMB for the cleaner …