Used Lasertec M-350H Wafer Inspection/Review system

Year: 2005

Lasertec M-350H Wafer Inspection/Review system 300mm Vintage:2005 As is

Used SCREEN DNS SS-3100

Year: 2009

300mm Wet Spin Scrubber Vintage:2009 As is

Used Ebara FREX 300

Year: 2002

The tool is fully operational, running Cu on both sides. The auxiliary equipment is a power cabinet and two chillers (one for each side). Chemical dispense systems support the whole fleet so no chemical dispense equipment would be included. We run off of slurry loops under the floor as well as direct chemical distribution from a VMB for the cleaner …