Aviza Technology, Inc. RVP-300 P01118036

Aviza Technology, Inc. RVP-300 Wafer machine Verified seller

Price on request

Manufacturer	Aviza Technology, Inc.
Model	RVP-300
Year
Location	Unknown country
Category	Semiconductor - Wafer equipment
Product id	P01118036
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Aviza Technology, Inc. RVP-300
Vertical Diffusion Furnace
Currently Configured for 300mm wafer size
EQUIPMENT DETAILS:
Process: ANNEAL
Tool config is based on original PO, please verify tool details at tool inspection
System, General Specification
Heater element Model FURNACE,ATM -APL
Process Condition AP
Maximum Operating Temperature 1200c
N2 Load Lock Yes
Wafer Type 300 SEMI STD-Notch
Qty. of Production Wafers 120 slots Ladder
Boat Operation 2 Boat Type
Software Version AVP 2.7.1 V
System, Furnace
Loading Area Light White 2
Force Air Cooiling system installed 1
Side Maintenance None None
O2 Density control 0-100ppm 1
N2 Boat shower wafer cooling None 1
Furnace Temperature Controller SSPC control 9
System, Wafer/Carrier Handling
Carrier Type 12" FOUP
Carrier Stage Capacity 16 FOUP
WTU Type GenMark
WTU alignment GenMark
WTU Teaching method Pre-aligner / dual beam
System, Gas Distribution
IGS Maker / Type Fujikin
IGS MFC Maker / Type AERA
IGS Press Transducer Maker / Type Mykrolis
System, Exhaust Specification
Vacuum Gage - 2 torr AP tool
Vacuum Gage - 10 torr AP tool
Vacuum Gage - 100 torr AP tool
Vacuum Gage - 1000 torr AP tool
Main Valve AP tool
Pump Maker/Model AP tool
Low vacuum valve AP tool
Trap AP tool
Vacuum Pressure Controller AP tool
System, Reactor
Process Tube (LP) None
Outer/Inner Tube Material (LP) None
Inner Tube Type (AP) Quartz Single
Inner T/C 12FT/HONEYWELL
Boat Materail/Type Sic
Boat Rotation None
Pedestal Materail/Type Quartz
Auto Shutter installed
System, Power Distribution
Voltage 3phase 480VAC
Voltage Single-phase None
Frequency 60Hz
Operation Panel Keyboard & Screen
Indicator Type Mouse
Operation software type Linux
Gas Leak Detector
Gas Leak Detector Materail/Type GasTech
System, Fixture List, Gas
IGS maintenance Fixture None
Vacuum Gauge None
Damage/Missing parts list
Dry pumps are not included with sales
Please inspect tool to reconfirm

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. Exapro recommends to check the details with the seller before a purchase

-------------------
Worked hours
Hours under power
State	good
At local norms	---------
Status	visible

Client type	Reseller
Active since	2010
Offers online	124
Last activity	Sept. 25, 2023

Description

Specifications

-------------------
Worked hours
Hours under power
State	good
At local norms	---------
Status	visible

About this seller

Client type	Reseller
Active since	2010
Offers online	124
Last activity	Sept. 25, 2023

Aviza Technology, Inc. RVP-300 Wafer machine Verified seller

Description

Specifications

About this seller

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